HPFS 7980 ARF (ArF Grade)
Grade
also Corning HPFS 7980
Pick for 193 nm immersion-lithography lenses and high-fluence ArF beam delivery, where laser-induced densification/rarefaction must be minimised.
Values for the ARF condition
Other HPFS 7980 tempers and conditions
HPFS 7980 is listed in 3 conditions; see the grade overview at HPFS 7980.
Compare all 3 conditionsHide
| Condition · open for datasheet | Best for | Yield MPa | Tensile MPa | Elong. % | Hardness | Conductivity |
|---|---|---|---|---|---|---|
KrF Grade | Pick for 248 nm lithography and KrF laser optics needing controlled induced absorption and low fluorescence. | — | 50 | 0 | 800 HV | 1 W/m·K |
ARFThis page ArF Grade | Pick for 193 nm immersion-lithography lenses and high-fluence ArF beam delivery, where laser-induced densification/rarefaction must be minimised. | — | 50 | 0 | 800 HV | 1 W/m·K |
Class 0A homogeneity | Specify when wavefront error is dominated by bulk index inhomogeneity (Δn ≤ 0.5 ppm) — large interferometer references and lithography lens elements. | — | 50 | 0 | 800 HV | 1 W/m·K |
What is HPFS 7980 ARF?
HPFS 7980 ARF is HPFS 7980 in the ARF grade — pick for 193 nm immersion-lithography lenses and high-fluence ArF beam delivery, where laser-induced densification/rarefaction must be minimised. HPFS 7980 ARF has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.7 GPa (10.5 Msi). HPFS 7980 ARF has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F).
Advantages
- Good corrosion resistance — 95/100, better than 92% of glass grades
- Lightweight — 2.2 g/cm³ (0.0795 lb/in³), better than 91% of glass grades
- High service temperature — 900°C (1,652 °F), better than 86% of glass grades
Limitations
- High embodied carbon — 20 kg CO₂/kg, worse than 80% of glass grades
HPFS 7980 ARF properties
Typical room-temperature values for HPFS 7980 ARF; 15 are specific to this condition. Other listed values are HPFS 7980 reference data and may not represent this condition. Bars are the position among glass grades.
Physical5
HPFS 7980 ARF has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F).
Mechanical12
HPFS 7980 ARF has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.7 GPa (10.5 Msi).
Thermal5
HPFS 7980 ARF is rated for continuous service to 900°C (1,652 °F). It conducts heat at 1.3 W/m·K (0.751 BTU/hr·ft·°F), worse than 53% of glass grades. Thermal expansion is 0.55 µm/m·K (0.306 µin/in·°F).
Electrical5
HPFS 7980 ARF is an electrical insulator with a dielectric strength of 30 kV/mm (762 V/mil) and a resistivity of 1×10¹⁶ Ω·m.
Chemical & Environmental2
Corrosion resistance is excellent (95/100), better than 92% of glass grades.
Sustainability4
Producing a kilogram of HPFS 7980 ARF takes about 300 MJ of energy and emits 20 kg of CO₂ — more than 80% of glass grades. Typical recycled content is 0%.
Manufacturability2
HPFS 7980 ARF's machinability is not recommended (12/100, worse than 68% of glass grades).
Values are nominal handbook figures for design screening. Confirm any required mill or lot documentation when quoting.
Working with HPFS 7980 ARF
Is HPFS 7980 easy to machine?
Diamond grinding, core drilling, ultrasonic and loose-abrasive lapping only; no conventional cutting — control subsurface damage before polishing.
Can HPFS 7980 be welded?
Joinable by H2/O2 torch or CO2-laser fusion and by optical contacting/frit bonding, but fusion locally destroys index homogeneity and adds strain, so it is avoided on precision optics.
Can HPFS 7980 be formed, bent or molded?
Hot slumping/pressing only above ~1600 °C in clean tooling; all blanks must be fine-annealed near 1040 °C and slow-cooled to remove stress birefringence.
What surface finishes work on HPFS 7980?
Pitch/CMP polish to <0.3 nm rms, HF etch or acid clean for damage removal, then ion-beam figuring and DUV AR/HR coatings; edges must be chamfered to avoid handling chips.
HPFS 7980 chemical composition (wt %)
Limits by weight percent from the governing specification, written the way the spec states them — a single maximum for impurities, a range for alloying elements, and the base element as balance. Nominal is the typical mid-range value.
| Element | Spec limit (wt %) | Nominal |
|---|---|---|
| OH≈800–1000 ppm hydroxyl | 0.08 – 0.1 | 0.09 |
| Clresidual chlorine, <100 ppm | ≤ 0.01 | 0.01 |
| metallic impurities (total)each metal typically <1 ppm | ≤ 1×10⁻⁴ | 5×10⁻⁵ |
| SiO2synthetic, flame-hydrolysis of SiCl4 | ≥ 100 (balance) | — |
HPFS 7980 ARF — frequently asked
What is HPFS 7980 ARF used for?
HPFS 7980 ARF is typically used for lithography lenses, excimer laser optics and precision windows. In short: deep-UV grade silica; excimer-durable fused silica; high optical homogeneity.
What is the tensile strength of HPFS 7980 ARF?
HPFS 7980 ARF has a typical tensile strength of 50 MPa (7.25 ksi) — stronger than 59% of glass grades. Strength varies by condition: see the 3 listed tempers.
Is HPFS 7980 ARF easy to machine?
Not especially — machinability is rated not recommended (12/100, worse than 68% of glass grades). Diamond grinding, core drilling, ultrasonic and loose-abrasive lapping only; no conventional cutting — control subsurface damage before polishing.
Can HPFS 7980 ARF be welded?
Joinable by H2/O2 torch or CO2-laser fusion and by optical contacting/frit bonding, but fusion locally destroys index homogeneity and adds strain, so it is avoided on precision optics.
What surface finishes work on HPFS 7980 ARF?
Pitch/CMP polish to <0.3 nm rms, HF etch or acid clean for damage removal, then ion-beam figuring and DUV AR/HR coatings; edges must be chamfered to avoid handling chips.
Can HPFS 7980 ARF be formed, bent or molded?
Hot slumping/pressing only above ~1600 °C in clean tooling; all blanks must be fine-annealed near 1040 °C and slow-cooled to remove stress birefringence.
What is the maximum service temperature of HPFS 7980 ARF?
HPFS 7980 ARF is rated for continuous use to about 900°C (1,652 °F). Strength falls off well before that limit — check the elevated-temperature data for load-bearing parts.
Sources
- HPFS Fused Silica Standard/KrF/ArF Grade Product Information — Corning Incorporated (Specialty Materials) (2021)
- Engineered Materials Handbook, Vol. 4: Ceramics and Glasses — ASM International (1991)
- Quartz Glass for Optics — Data and Properties — Heraeus Conamic (2023)
- ASTM C1770 / SEMI optical fused silica characterization practices — ASTM International / SEMI (2019)
Property data is compiled from published supplier and standards handbooks and normalised for comparison. Nothing on this page is a certification — request mill certs, CoC or material test reports with your order.