HPFS 7980
also Corning HPFS 7980
HPFS 7980 (Corning HPFS 7980) is a high-purity synthetic fused silica optimized for deep-UV service, offered in standard, KrF, ArF and 0A grades.
Reference datasheet — HPFS 7980 is not in the instant-quote catalog. Upload your part and an engineer will quote it in this grade or suggest the closest stocked equivalent.
HPFS 7980 tempers and conditions
HPFS 7980 is supplied in 3 conditions, soft to hard.
Compare all 3 conditionsHide
| Condition · open for datasheet | Best for | Yield MPa | Tensile MPa | Elong. % | Hardness | Conductivity |
|---|---|---|---|---|---|---|
KrF Grade | Pick for 248 nm lithography and KrF laser optics needing controlled induced absorption and low fluorescence. | 50 | 0 | 800 HV | 1 W/m·K | |
ArF Grade | Pick for 193 nm immersion-lithography lenses and high-fluence ArF beam delivery, where laser-induced densification/rarefaction must be minimised. | 50 | 0 | 800 HV | 1 W/m·K | |
Class 0A homogeneity | Specify when wavefront error is dominated by bulk index inhomogeneity (Δn ≤ 0.5 ppm) — large interferometer references and lithography lens elements. | 50 | 0 | 800 HV | 1 W/m·K |
Supply forms, finishes and certifications
Ways HPFS 7980 is supplied — form, process route, surface or paperwork — without a datasheet of their own. The property values above apply.
| Option | What it is | Type |
|---|---|---|
STDDefault | Standard Grade | Standard supply |
What is HPFS 7980?
HPFS 7980 (Corning HPFS 7980) is a high-purity synthetic fused silica optimized for deep-UV service, offered in standard, KrF, ArF and 0A grades. It is used for lithography lens elements, excimer laser optics and precision windows because of its optical homogeneity and resistance to UV-induced damage, and is supplied as boules, sliced blanks and polished plates. Maximum service temperature is 900 °C and machinability is low (score 12), so only diamond and abrasive processes apply and finished blanks are expensive. Suprasil is the equivalent alternative from another supplier. HPFS 7980 has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F). HPFS 7980 has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.7 GPa (10.5 Msi).
What is HPFS 7980 used for?
- Lithography lenses
- Excimer laser optics
- Precision windows
Advantages
- Good corrosion resistance — 95/100, better than 92% of glass grades
- Lightweight — 2.2 g/cm³ (0.0795 lb/in³), better than 91% of glass grades
- High service temperature — 900°C (1,652 °F), better than 86% of glass grades
Limitations
- High embodied carbon — 20 kg CO₂/kg, worse than 80% of glass grades
HPFS 7980 properties
Typical room-temperature values; bars are the position among glass grades.
Physical5
HPFS 7980 has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F).
Mechanical12
HPFS 7980 has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.7 GPa (10.5 Msi).
Thermal5
HPFS 7980 is rated for continuous service to 900°C (1,652 °F). It conducts heat at 1.3 W/m·K (0.751 BTU/hr·ft·°F), worse than 53% of glass grades. Thermal expansion is 0.55 µm/m·K (0.306 µin/in·°F).
Electrical5
HPFS 7980 is an electrical insulator with a dielectric strength of 30 kV/mm (762 V/mil) and a resistivity of 1×10¹⁶ Ω·m.
Chemical & Environmental2
Corrosion resistance is excellent (95/100), better than 92% of glass grades.
Sustainability4
Producing a kilogram of HPFS 7980 takes about 300 MJ of energy and emits 20 kg of CO₂ — more than 80% of glass grades. Typical recycled content is 0%.
Manufacturability2
HPFS 7980's machinability is not recommended (12/100, worse than 68% of glass grades).
Common Calculations4
Values are nominal handbook figures for design screening. Certified mill or lot data ships with every FabDigit order on request.
Strength versus weight in the glass family
Yield strength against density for every glass grade FabDigit runs. HPFS 7980 is highlighted; hover a dot for its name, or open the interactive family chart.
Working with HPFS 7980
Is HPFS 7980 easy to machine?
Diamond grinding, core drilling, ultrasonic and loose-abrasive lapping only; no conventional cutting — control subsurface damage before polishing.
Can HPFS 7980 be welded?
Joinable by H2/O2 torch or CO2-laser fusion and by optical contacting/frit bonding, but fusion locally destroys index homogeneity and adds strain, so it is avoided on precision optics.
Can HPFS 7980 be formed, bent or molded?
Hot slumping/pressing only above ~1600 °C in clean tooling; all blanks must be fine-annealed near 1040 °C and slow-cooled to remove stress birefringence.
HPFS 7980 chemical composition (wt %)
Limits by weight percent from the governing specification, written the way the spec states them — a single maximum for impurities, a range for alloying elements, and the base element as balance. Nominal is the typical mid-range value.
| Element | Spec limit (wt %) | Nominal |
|---|---|---|
| OH≈800–1000 ppm hydroxyl | 0.08 – 0.1 | 0.09 |
| Clresidual chlorine, <100 ppm | ≤ 0.01 | 0.01 |
| metallic impurities (total)each metal typically <1 ppm | ≤ 1×10⁻⁴ | 5×10⁻⁵ |
| SiO2synthetic, flame-hydrolysis of SiCl4 | ≥ 100 (balance) |
What surface finishes work on HPFS 7980?
Pitch/CMP polish to <0.3 nm rms, HF etch or acid clean for damage removal, then ion-beam figuring and DUV AR/HR coatings; edges must be chamfered to avoid handling chips.
Equivalent designations
Standards and trade names that resolve to HPFS 7980 in FabDigit's catalog. Equivalence is nominal — check the exact specification when certification matters.
- Trade names
- Corning HPFS 7980
How much does HPFS 7980 cost?
HPFS 7980 is a high-cost glass ($$$$), pricier than about 78% of the materials FabDigit quotes. Part price depends far more on geometry, tolerance and quantity than on the raw stock — upload a CAD file for a live quote.
HPFS 7980 — frequently asked
What is HPFS 7980 used for?
HPFS 7980 is typically used for lithography lenses, excimer laser optics and precision windows. In short: deep-UV grade silica; excimer-durable fused silica; high optical homogeneity.
What is the tensile strength of HPFS 7980?
HPFS 7980 has a typical tensile strength of 50 MPa (7.25 ksi) — stronger than 59% of glass grades. Strength varies by condition: see the 3 listed tempers.
Is HPFS 7980 easy to machine?
Not especially — machinability is rated not recommended (12/100, worse than 68% of glass grades). Diamond grinding, core drilling, ultrasonic and loose-abrasive lapping only; no conventional cutting — control subsurface damage before polishing.
Can HPFS 7980 be welded?
Joinable by H2/O2 torch or CO2-laser fusion and by optical contacting/frit bonding, but fusion locally destroys index homogeneity and adds strain, so it is avoided on precision optics.
What surface finishes work on HPFS 7980?
Pitch/CMP polish to <0.3 nm rms, HF etch or acid clean for damage removal, then ion-beam figuring and DUV AR/HR coatings; edges must be chamfered to avoid handling chips.
Can HPFS 7980 be formed, bent or molded?
Hot slumping/pressing only above ~1600 °C in clean tooling; all blanks must be fine-annealed near 1040 °C and slow-cooled to remove stress birefringence.
What is the maximum service temperature of HPFS 7980?
HPFS 7980 is rated for continuous use to about 900°C (1,652 °F). Strength falls off well before that limit — check the elevated-temperature data for load-bearing parts.
How much does HPFS 7980 cost?
HPFS 7980 is a high-cost glass ($$$$), pricier than about 78% of the materials FabDigit quotes. Part price depends far more on geometry, tolerance and quantity than on the raw stock — upload a CAD file for a live quote.
Sources
- HPFS Fused Silica Standard/KrF/ArF Grade Product Information — Corning Incorporated (Specialty Materials) (2021)
- Engineered Materials Handbook, Vol. 4: Ceramics and Glasses — ASM International (1991)
- Quartz Glass for Optics — Data and Properties — Heraeus Conamic (2023)
- ASTM C1770 / SEMI optical fused silica characterization practices — ASTM International / SEMI (2019)
Property data is compiled from published supplier and standards handbooks and normalised for comparison; hardness values on non-Brinell scales are converted approximately for charting only. Manufacturability limits are FabDigit quote-engine defaults and may be relaxed by engineering review. Nothing on this page is a certification — request mill certs, CoC or material test reports with your order.