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CaF2 VUV-193

Grade

also Irtran-3

VUV-193 = vUV/Excimer

Choose the lithography and excimer-laser grade when transmission from 0.13 µm, very low fluorescence and stress birefringence, and resistance to radiation-induced colour centres are required.

High cost $$$$

Values for the VUV-193 condition

Other CaF2 tempers and conditions

CaF2 is listed in 3 conditions; see the grade overview at CaF2.

Compare all 3 conditionsHide
Condition · open for datasheetBest forYield MPaTensile MPaElong. %HardnessConductivity
VUV-193This page
VUV/Excimer
Choose the lithography and excimer-laser grade when transmission from 0.13 µm, very low fluorescence and stress birefringence, and resistance to radiation-induced colour centres are required.—370165 HV10 W/m·K
IR-grade single crystal
Use the lower-cost infrared blank for FTIR windows and IR lenses working from 0.25 to 9 µm, accepting uncontrolled absorption and fluorescence at the UV end.—370165 HV10 W/m·K
Poly
Pick the hot-pressed polycrystal for large domes needing higher strength and thermal-shock resistance than single crystal; grain-boundary scatter lowers UV and long-wave transmission.———205 HV—

What is CaF2 VUV-193?

CaF2 VUV-193 is CaF2 in the VUV-193 grade — choose the lithography and excimer-laser grade when transmission from 0.13 µm, very low fluorescence and stress birefringence, and resistance to radiation-induced colour centres are required. CaF2 VUV-193 has a tensile strength of 37 MPa (5.37 ksi), weaker than 70% of glass grades. The elastic modulus is 75.8 GPa (11 Msi). CaF2 VUV-193 has a density of 3.18 g/cm³ (0.115 lb/in³), heavier than 58% of glass grades. It melts at 1,418°C (2,584 °F).

Advantages

  • High service temperature — 800°C (1,472 °F), better than 81% of glass grades
  • Easy to machine — 42/100, better than 80% of glass grades
  • Conducts heat well — 9.7 W/m·K (5.6 BTU/hr·ft·°F), better than 78% of glass grades

Limitations

  • Needs corrosion protection — 45/100, worse than 84% of glass grades
  • Low fracture toughness — 0.33 MPa·√m (0.3 ksi·√in), worse than 81% of glass grades
  • Hard to polish — 70/100, worse than 76% of glass grades

CaF2 VUV-193 properties

Typical room-temperature values for CaF2 VUV-193; 15 are specific to this condition. Other listed values are CaF2 reference data and may not represent this condition. Bars are the position among glass grades.

Physical5

CaF2 VUV-193 has a density of 3.18 g/cm³ (0.115 lb/in³), heavier than 58% of glass grades. It melts at 1,418°C (2,584 °F).

Density3.18 g/cm³0.11 lb/in³
Melting Point (Solidus)1,418°C2,584 °F
Refractive Index1.501
Light Transmission92%
Porosity0%

Mechanical10

CaF2 VUV-193 has a tensile strength of 37 MPa (5.37 ksi), weaker than 70% of glass grades. The elastic modulus is 75.8 GPa (11 Msi).

Elastic (Young's) Modulus75.8 GPa11 Msi
Shear Modulus33.8 GPa4.9 Msi
Bulk Modulus83 GPa12 Msi
Poisson's Ratio0.26
Tensile Strength (Ultimate)37 MPa5.4 ksi
Flexural Strength37 MPa5.4 ksi
Fracture Toughness (K_IC)0.33 MPa·√m0.3 ksi·√in
Hardness, Vickers165 HV
Hardness, Knoop158 HK
Hardness, Mohs4

Thermal5

CaF2 VUV-193 is rated for continuous service to 800°C (1,472 °F). It conducts heat at 9.7 W/m·K (5.6 BTU/hr·ft·°F), better than 78% of glass grades. Thermal expansion is 18.9 µm/m·K (10.5 µin/in·°F).

Thermal Conductivity9.7 W/m·K5.6 BTU/hr·ft·°F
Specific Heat Capacity854 J/kg·K0.2 BTU/lb·°F
Thermal Expansion (CTE, 20–100 °C)18.9 µm/m·K10.5 µin/in·°F
Max Service Temperature (continuous)800°C1,472 °F
Min Service Temperature-200°C-328 °F

Electrical3

CaF2 VUV-193 has an electrical resistivity of 1×10¹⁴ Ω·m.

Electrical Resistivity1×10¹⁴ Ω·m3.94×10²¹ µΩ·in
Dielectric Constant (1 MHz)6.76
Volume Resistivity1×10¹⁶ Ω·cm

Chemical & Environmental2

Corrosion resistance is fair (45/100), worse than 84% of glass grades.

Corrosion ResistanceFair45/100
Chemical Resistance Summary—

Manufacturability2

CaF2 VUV-193's machinability is fair (42/100, better than 80% of glass grades).

MachinabilityFair42/100
PolishabilityVery good70/100

Values are nominal handbook figures for design screening. Confirm any required mill or lot documentation when quoting.

Working with CaF2 VUV-193

Is CaF2 easy to machine?

Grind with diamond wheels at low contact pressure or finish by single-point diamond turning, keeping loads light to avoid edge chipping along the {111} cleavage planes. Use anhydrous oil-based coolant only; water-based fluids are not permitted.

Can CaF2 be welded?

Not weldable; mount with elastomeric retaining rings, low-stress cementing or optical contact, since assembly stress induces birefringence.

Can CaF2 be formed, bent or molded?

Boules are grown in vacuum from high-purity CaF₂ powder with an oxygen scavenger by the Bridgman–Stockbarger crucible-descent method and then annealed to relieve stress. Polycrystalline parts are produced by hot pressing.

What surface finishes work on CaF2?

Rough-grind first, then polish on pitch laps with cerium oxide or alumina. Finish with an MgF₂ or multilayer UV/IR anti-reflection coating to raise transmission and protect against moisture.

CaF2 chemical composition (wt %)

Limits by weight percent from the governing specification, written the way the spec states them — a single maximum for impurities, a range for alloying elements, and the base element as balance. Nominal is the typical mid-range value.

ElementSpec limit (wt %)Nominal
Castoichiometric CaF251 – 51.451.33
Fmetals <50 ppm; UV/excimer grade: O, Ce, Na, K <1-5 ppm≥ 48.6 (balance)—

CaF2 VUV-193 — frequently asked

What is CaF2 VUV-193 used for?

CaF2 VUV-193 is typically used for UV lithography lenses, excimer laser optics, spectroscopic windows and IR windows. In short: broadest UV-IR transmission; lowest dispersion fluoride crystal; standard 193 nm optic.

What is the tensile strength of CaF2 VUV-193?

CaF2 VUV-193 has a typical tensile strength of 37 MPa (5.37 ksi) — weaker than 70% of glass grades. Strength varies by condition: see the 3 listed tempers.

Is CaF2 VUV-193 easy to machine?

Not especially — machinability is rated fair (42/100, better than 80% of glass grades). Grind with diamond wheels at low contact pressure or finish by single-point diamond turning, keeping loads light to avoid edge chipping along the {111} cleavage planes. Use anhydrous oil-based coolant only; water-based fluids are not permitted.

Can CaF2 VUV-193 be welded?

Not weldable; mount with elastomeric retaining rings, low-stress cementing or optical contact, since assembly stress induces birefringence.

What surface finishes work on CaF2 VUV-193?

Rough-grind first, then polish on pitch laps with cerium oxide or alumina. Finish with an MgF₂ or multilayer UV/IR anti-reflection coating to raise transmission and protect against moisture.

Can CaF2 VUV-193 be formed, bent or molded?

Boules are grown in vacuum from high-purity CaF₂ powder with an oxygen scavenger by the Bridgman–Stockbarger crucible-descent method and then annealed to relieve stress. Polycrystalline parts are produced by hot pressing.

What is the maximum service temperature of CaF2 VUV-193?

CaF2 VUV-193 is rated for continuous use to about 800°C (1,472 °F). Strength falls off well before that limit — check the elevated-temperature data for load-bearing parts.

Sources

  1. Calcium Fluoride (CaF2) optical material datasheet — Crystran Ltd (2023)
  2. Engineered Materials Handbook Vol.4 — Ceramics and Glasses — ASM International (1991)
  3. Handbook of Optical Constants of Solids — Academic Press (Palik ed.) (1998)
  4. Calcium Fluoride for excimer laser and lithography optics — Corning Advanced Optics / Hellma Materials (2022)

Property data is compiled from published supplier and standards handbooks and normalised for comparison. Nothing on this page is a certification — request mill certs, CoC or material test reports with your order.