Suprasil S311
Grade
S311 = suprasil 311/312
Use for large UV/excimer optics where high-OH DUV transmission and large-aperture index homogeneity must be combined.
Values for the S311 condition
Other Suprasil tempers and conditions
Suprasil is listed in 4 conditions; see the grade overview at Suprasil.
Compare all 4 conditionsHide
| Condition · open for datasheet | Best for | Yield MPa | Tensile MPa | Elong. % | Hardness | Conductivity |
|---|---|---|---|---|---|---|
S1-2Default Suprasil 1/2 | Standard choice for DUV/UV optics, spectrophotometer cells and lenses up to ~2.2 µm; ~1000 ppm OH gives best UV transmission but a strong 2.73 µm absorption band. | — | 50 | 0 | 850 HV | 1 W/m·K |
Suprasil 300 | Pick when transmission through the 2.7 µm OH band out to ~3.5 µm is required, or when a higher-viscosity, higher-temperature-capable synthetic silica is needed. | — | 50 | 0 | 870 HV | 1 W/m·K |
Suprasil 3001/3002 | For large interferometer, laser and lithography optics needing Δn ≤ 1×10⁻⁶ in three directions plus low OH content. | — | 50 | 0 | 870 HV | 1 W/m·K |
S311This page Suprasil 311/312 | Use for large UV/excimer optics where high-OH DUV transmission and large-aperture index homogeneity must be combined. | — | 50 | 0 | 850 HV | 1 W/m·K |
What is Suprasil S311?
Suprasil S311 is Suprasil in the S311 grade — use for large UV/excimer optics where high-OH DUV transmission and large-aperture index homogeneity must be combined. Suprasil S311 has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.5 GPa (10.5 Msi). Suprasil S311 has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F). S1-2 is the default condition FabDigit quotes; S311 is available on request or by drawing note.
Advantages
- Good corrosion resistance — 96/100, better than 98% of glass grades
- Lightweight — 2.2 g/cm³ (0.0795 lb/in³), better than 91% of glass grades
- High service temperature — 900°C (1,652 °F), better than 86% of glass grades
Suprasil S311 properties
Typical room-temperature values for Suprasil S311; 15 are specific to this condition. Other listed values are Suprasil reference data and may not represent this condition. Bars are the position among glass grades.
Physical5
Suprasil S311 has a density of 2.2 g/cm³ (0.0795 lb/in³), lighter than 91% of glass grades. It melts at 1,713°C (3,115 °F).
Mechanical13
Suprasil S311 has a tensile strength of 50 MPa (7.25 ksi), stronger than 59% of glass grades. Elongation at break is 0% and the elastic modulus is 72.5 GPa (10.5 Msi).
Thermal5
Suprasil S311 is rated for continuous service to 900°C (1,652 °F). It conducts heat at 1.4 W/m·K (0.797 BTU/hr·ft·°F), better than 54% of glass grades. Thermal expansion is 0.52 µm/m·K (0.289 µin/in·°F).
Electrical5
Suprasil S311 is an electrical insulator with a dielectric strength of 30 kV/mm (762 V/mil) and a resistivity of 1×10¹⁶ Ω·m.
Chemical & Environmental2
Corrosion resistance is excellent (96/100), better than 98% of glass grades.
Sustainability4
Producing a kilogram of Suprasil S311 takes about 180 MJ of energy and emits 12 kg of CO₂ — more than 69% of glass grades. Typical recycled content is 0%.
Manufacturability2
Suprasil S311's machinability is not recommended (10/100, worse than 80% of glass grades).
Values are nominal handbook figures for design screening. Confirm any required mill or lot documentation when quoting.
Working with Suprasil S311
Is Suprasil easy to machine?
Diamond core drilling, grinding and lapping only; no conventional cutting — keep coolant flowing and avoid edge chipping, then acid-etch or fine-grind to remove subsurface damage.
Can Suprasil be welded?
Joined by oxy-hydrogen flame working or CO₂-laser fusion at >1700 °C; high-OH grades bubble more easily, and any handling contamination causes devitrification.
Can Suprasil be formed, bent or molded?
Shaped hot by flame/electric-furnace drawing, sagging or fusing above the ~1600 °C softening point; always follow with a slow anneal near 1100 °C to remove stress birefringence.
What surface finishes work on Suprasil?
Polishes to <0.5 nm RMS with cerium oxide or colloidal silica; typically finished with AR/DUV coatings, and HF etching is used for cleaning and stress-free surface removal.
Suprasil chemical composition (wt %)
Limits by weight percent from the governing specification, written the way the spec states them — a single maximum for impurities, a range for alloying elements, and the base element as balance. Nominal is the typical mid-range value.
| Element | Spec limit (wt %) | Nominal |
|---|---|---|
| OH≈1000 ppm in Suprasil 1/2 and 311/312; <1 ppm in Suprasil 300/3001 | 0 – 0.13 | 0.1 |
| Clresidual from precursor, mainly in low-OH grades | 0 – 0.02 | 0.01 |
| Al<50 ppb typical | ≤ 2×10⁻⁵ | 5×10⁻⁶ |
| Naalkali total in ppb range | ≤ 2×10⁻⁵ | 5×10⁻⁶ |
| Fe<20 ppb typical | ≤ 2×10⁻⁵ | 2×10⁻⁶ |
| SiO2synthetic, flame-hydrolysis of SiCl4 | ≥ 99.99 (balance) | — |
Suprasil S311 — frequently asked
What is Suprasil S311 used for?
Suprasil S311 is typically used for UV/DUV lens elements, semiconductor lithography optics and laser windows. In short: high UV transmission silica; low-OH synthetic quartz; lithography-grade purity.
What is the tensile strength of Suprasil S311?
Suprasil S311 has a typical tensile strength of 50 MPa (7.25 ksi) — stronger than 59% of glass grades. Strength varies by condition: see the 4 listed tempers.
Is Suprasil S311 easy to machine?
Not especially — machinability is rated not recommended (10/100, worse than 80% of glass grades). Diamond core drilling, grinding and lapping only; no conventional cutting — keep coolant flowing and avoid edge chipping, then acid-etch or fine-grind to remove subsurface damage.
Can Suprasil S311 be welded?
Joined by oxy-hydrogen flame working or CO₂-laser fusion at >1700 °C; high-OH grades bubble more easily, and any handling contamination causes devitrification.
What surface finishes work on Suprasil S311?
Polishes to <0.5 nm RMS with cerium oxide or colloidal silica; typically finished with AR/DUV coatings, and HF etching is used for cleaning and stress-free surface removal.
Can Suprasil S311 be formed, bent or molded?
Shaped hot by flame/electric-furnace drawing, sagging or fusing above the ~1600 °C softening point; always follow with a slow anneal near 1100 °C to remove stress birefringence.
What is the maximum service temperature of Suprasil S311?
Suprasil S311 is rated for continuous use to about 900°C (1,652 °F). Strength falls off well before that limit — check the elevated-temperature data for load-bearing parts.
Sources
- Quartz Glass for Optics — Data and Properties (Suprasil / Infrasil / Homosil) — Heraeus Conamic (2023)
- HPFS Fused Silica Standard Grade Optical Materials Product Information — Corning (2022)
- ASM Engineered Materials Handbook Vol. 4: Ceramics and Glasses — ASM International (1991)
- GB/T 15594 / JGS1 synthetic fused silica classification — SAC (2017)
Property data is compiled from published supplier and standards handbooks and normalised for comparison. Nothing on this page is a certification — request mill certs, CoC or material test reports with your order.